The Micromanipulator Company

Now more than ever, Micromanipulator offers the best range of probe stations to meet virtually every application and budget.  Together our two excellent brands, Micromanipulator and Mechatronics, offers probe stations for those that want a dependable, economical model for basic applications to someone requiring a prober for the most demanding ones.  We also provide the best customer support to ensure you get the optimal performance out of your system.   

On our website, we have put together a chart that compares Micromanipulator probe stations with Mechatronics and should help you decide which model is right for your requirements and budgetary considerations. Micromanipulator’s line of probe stations offers the industry’s leading temperature testing, performance, and comprehensive configuration options and accessories.  The new Mechatronics brand is specifically designed for basic probing application and has an intuitive and easy-to-learn system.   

As you can see from our chart, both brands have a manual model; however, the Micromanipulator brand is typically suitable for more demanding applications and also offers motorized and semiautomatic systems, board level systems and thermal systems.  Furthermore, Micromanipulator probe stations are field upgradeable.  Mechatronics offers preconfigured packages as well as the option to configure a Mechatronics to suit your needs.   

The Micromanipulator line can handle wafer sizes up to 300mm while the Mechatronics is designed for wafers up to 150mm.  Both brands have a line of high-quality accessories and consumables. In addition customers can order consumables and accessories such as probe tips, holders, manipulators, and vacuum add-ons as well as the Mechatronics system through our online store.  For the Micromanipulator brand, customers can buy consumables and accessories at our online store.    Please visit our website or contact us if you have any questions regarding our quality probe stations.     

At Micromanipulator, we think knowledge is critical to making good decisions, which is why the more you learn about our company and our products; the easier it will be to make the decision to buy from us.  One of the things that sets us apart from the competition is that throughout our many decades in the business, we have always listened and learned from our customers. In fact, this is what drives our quest for innovative designs and product development.   

Also Micromanipulator is not a newcomer to the industry.  We have over 60 years of analytic probing experience that has allowed us to successfully provide customers with the state-of-the-art tools they need to develop the products of the future.  One example is our advanced technology that allows system operators to concentrate on their data and not the prober.  Micromanipulator’s “systems approach” to integration additionally includes quality accessories designed for vibration isolation and thermal management along with flexible and open architectures and a choice of materials.   

Now along with an extensive selection of Micromanipulator’s manual, motorized, and semi-automatic probers, we offer our most economical probe stations, the new Mechatronics ACE Systems.  This means customers can choose a probe station for basic probing applications that meets their personal preferences as well as their budget.   Also our accessories are the best on the market and include thermal wafer chucks, microscopes, vibration isolation, light and noise shields, manipulators, DC and RF measurement hardware and more. 

As a Micromanipulator customer, you get the benefit of our worldwide network of service support engineers who offer full system level support services for everything from optics to thermal chucks.  To protect your investment, we offer extended warranties, preventative maintenance programs and upgrade paths even for obsolete tools.  Please visit our website to learn more.   

Along with Micromanipulator’s brand new preconfigured Mechatronics probe stations, we also offer a basic Mechatronics ACE Trinocular Scope Base Station (Only) as well as a Mechatronics ACE – Configure Your Own Probe System.  Both models can be ordered through our online store. 

To configure your new Mechatronics ACE probe station, you just need to select your options before you put it into your cart (the order form walks you through the process).  The range of options includes the choice of a Binocular microscope (ACE-SCP-BINO) or a Trinocular Microscope (ACE-SCP-TRI), it is up to you to decide which best suits your needs.  You can even add a USB camera.  After that, we ask you to select your probe holder from a choice of Single Wire (Pair) or a Coaxial (Pair), or skip this option altogether.  After the Mechatronics ACE is in your cart, you will have the opportunity to order more prober holders.  

We also have a great selection of Mechatronics ACE Probe Tips that are available in boxes of 5.  If you need a customized tip, we also offer those. Next, you can choose your manipulator from a choice of magnetic or vacuum. Remember for the station to be complete, you need to have at least one left hand and right hand manipulator. In addition you can add either a Mini-Vac vacuum pump or the Ace-Vac-Puc Vacuum Collection Plate. 

The order form clearly shows what you have added to your Mechatronics probe station and provides a total.  On the bottom of the page, we offer descriptions of some of the options along with a link to a pdf that describes the Mechatronics’ features and specifications in great detail.  Please visit our website for more information.   

Micromanipulator is pleased to introduce a brand new line of economical, efficient probe stations.  The Mechatronics ACE prober is ideal for customers who need a tool for probing basic applications and is designed to allow users to intuitively and easily learn the system. It also offers a range of innovative features.

The line currently includes several preconfigured Mechatronics ACE models that come with everything you need to get started. These dependable probe stations offer the best value with their low cost of ownership and effortless operation.  The Mechatronics probers are also easy to set up and use. Furthermore, even though our new line is budget friendly, we have leveraged all of Micromanipulator’s extensive expertise and designs to ensure users an efficient performance for basic probing applications.  

In addition the preconfigured packaged probe stations can be conveniently ordered through our ecommerce store.  Moreover if you want to configure a Mechatronics probe station to meet your specifications, we make it easy to do so by offering a broad range of accessories including manipulators, microscopes, probe holders, and probe tips.

One example of our brand new line is the Mechatronics ACE Binocular Scope probe station that supports 3” to 6” (75-150mm) wafers (small pieces with Vac Puc accessory).   Featuring a binocular stereo zoom microscope, the ACE probe station’s specifications include a 6″ (150mm) x 6″ (150mm) X, Y, Quick 90 degree theta rotation detent with ergonomically controls located outside the station platen footprint.   The probe station is nickel plated and fixed and supports up to 10 magnetic or vacuum base manipulators.

Please visit our website to learn more about the new Mechatronics as well as our Micromanipulator probe stations.  If you have further questions, do not hesitant to give us a call.  

Micromanipulator’s exceptional products include manufacturing the finest equipment for probing small geometries.  To ensure our products meet not only our exacting standards but meet the various needs of our customers, we commit time and energy into solving a range of applications problems.  Many of these common problems are discussed in our Application Notes as well as our Probe Tips and Probe Holder Reference Manual. 

For example our team spent hours researching a solution for the common probing dilemma of maintaining probe contact during temperature stressing of wafers, which can compound the natural difficulties already associated with probing.  We know this is due to the relative motion between the fixed probe connection to the manipulator and the desired probe site on the wafer.  The problem is caused by the effects of the thermal expansion as materials are heated and/or the converse contraction when they are cooled, which results in the relative motion. Furthermore, as the motions occur in all dimensional axes, system operators can encounter different perspectives on different probing problems.  

 At Micromanipulator, we design and manufacture an extensive range of high compliance probe points for probing small geometries.  One example is our high compliance Model 7F probe point that follows a target device as it moves in the X, Y, and Z axes.  We suggest that to improve your success, you probe as close to the vertical as you can get using the very fine wire tip of the 7F.  The flexible probe concept is one of the safest ways to probe on very thin oxide sites regardless of thermal cycling and certain thin oxides have shown no damage when vertically probing with our Model 7F.   

On our website, you will find several tips for probing small geometries.  We remind users that a little technique can go a long way.  By following our simple guidelines, we feel sure you will have more success finding the most suitable probing angle and/or technique.  Please visit Micromanipulator’s site to learn more. 

Micromanipulator offers the most comprehensive selection of analytical probing hardware on the market including the world’s most versatile probe station. Our impressive, patented 2210-LS combines the traditional wafer probe to the device exercising capabilities of the application board.  By offering above and below ambient temperature stress, it is designed to address today’s advanced system level FA challenges.   

Since application boards used as part of a post tape out test plan are not suitable for in-circuit probing with traditional techniques optimized for the wafer level, the versatile 2210 provides the optimal solution.  Micromanipulator’s application board/probe station is specifically designed to migrate the wafer level probe capability to the system level application board in order to assist with post tape-out product spins. 

The 2210 also provides extensive application coverage such as basic DC, to E and K-Band analysis.  Also as a user, you will find it is loaded with standard features including an open and stable platform for high magnification sample viewing and probing. It provides the option to probe either at the application board block or at system level while exercising the chip in mission mode.  Furthermore, the 2210-LS has the capability to allow you to easily trace and analyze issues that manifest only in the actual end application environment.  These include inter-block device interface and tolerance issues; power issues; and between-block issues such as mixed-signal interface.  You have the ability to analyze race conditions and clocking domain as well.    

We think you will find the versatile 2210-LS is the ideal choice for a variety of applications.  Along with the comprehensive accessory support and flexible setups, we also offer temperature and ambient versions.  Micromanipulator also designs and manufactures high quality accessories such as our optical vibration isolation table, removable ambient and thermal chucks for wafer level probing, stereo zoom and compound microscopes, CCD and video monitor options, and shroud enclosure for light shielding. 

For more than 60 years, Micromanipulator’s goal has been to design, engineer and manufacturer the finest tools available for the semi-conductor industry.  As our customers’ needs have evolved and changed throughout the years, so have the tools we continue to develop to meet those needs.  This is why we can honestly say we provide tools for virtually any application.     

From our broad selection of probe stations to our accessories and consumables, we are sure to have what you need to make your job both easier and more productive. That is certainly the case with our high frequency probe holders.  When you visit our website, you will discover an excellent selection of high frequency probe holders of which some are now available at our ecommerce store.   

One example of Micromanipulator’s high frequency probe holders is the Model PP40A that offers a bandwidth of DC-40GHz.  Specifications of the PP40A include any pitch from 50 to 2540 microns and an insertion loss rate of less than 0.8 db.  It also offers a return loss greater than 18 db and measurement repeatability better than -80db.  To meet your needs, the probe holder is available in standard or dual differential configurations.   

Our Model PP50 WR22 has a bandwidth of 33-50 GHz and an insertion loss of 1.0 db max. The return loss rate is 15 db max and a measurement repeatability of -55 db.  It is available with and without a bias T.   

For more information regarding not only our high frequency probe holders but our extensive selection of probe holders, probe tips and manipulators; please refer to our Probe Tips and Probe Holders Reference Manual on our website.  Furthermore, our knowledgeable engineers are ready to help as we base our success on the success of our customers.   

Micromanipulator is pleased to offer our customers a full line of probe stations that range from our system level probers and semi-automatics, to our high performance manual and general purpose manual probe stations.  With such a large line of probers, we have a wafer probe station for virtually any testing application.  Furthermore, as we design and manufacture an extensive line of options, you can configure your equipment to get exactly what you need.

One high performance manual probe station that continues to be a popular choice among customers is the Model 8060 (150-200mm). Along with offering the value of efficiency as well as consistent, accurate electrical and mechanical performance, the 8060 is the manual 150-200mm probe station of choice for demanding analytical testing applications across the globe.

It is designed for ease of use in demanding applications such as very low current and voltage probing, sub-micron target probing to the limits of visible optics, and high and low temperature probing.  The highest performance 8060 is also the highest value 200mm analytical prober on the market today.

In addition the prober offers comprehensive accessory support to broaden testing applications such as an integrated environment that supports dark – shielded – dry probing.  It is also hot and cold chuck compatible (field upgradeable).  Other popular accessories include probe card holders, manipulators, unique probe holders, vibration isolation tables, and camera systems. We also offer light tight enclosures (LTEs).

You will discover that the low cost of ownership and the price-performance value of the model 8060’s high efficiency features and rugged reliability make it a truly cost-effective answer for high performance analytical probing.  Please visit our website to learn more about this impressive probe station and our other models.  If you have any questions, please give us a call and we will be glad to help.  

Micromanipulator not only sells the finest selection of probe tips and probe holders but we also provide information to help extend the life of our products. Using the proper cleaning techniques and protecting your probe tips from corrosion will help to maintain the integrity of your test probes and probe holders and ensure their optimal performance. 

In our Probe Tips and Probe Holders Reference Manual (available on our website), we go over the various techniques for cleaning and protecting your products.  However please note that the procedures for corrosion protection and cleaning differ depending on the material of the probe tips and holders.   

To clean your probe holders, we recommend applying a methanol solution to the tip of the holder with a swab or other suitable applicator.  Do not soak the holder in the solution.  After you have applied the methanol, bake the shank at 200o F-300o F for a minimum of 6 hours.   

To remove deposits from one of our tungsten, tungsten carbide, nickel tips and HCT tips as well as a platinum-coated custom probe tip, first rinse it in deionized water and then use compressed air to dry the excess water from the tip.  If you need to remove oxide deposits, we suggest dipping the probe tip into a 1.0 solution of normal sodium hydroxide (NaOH) for a few seconds. Again rinse the tip with deionized water and dry with compressed air.    

To remove deposits from one of our beryllium copper probe tips, follow the same steps as for our tungsten tips, rinsing in deionized water and using compressed air to dry.  If you need to remove oxide deposits from a beryllium copper tip, wash the tip in a 10% w/w sodium carbonate solution (NA2CO3) and rinse in deionized water. Do not dry the tip but instead use a 10% v/v nitric acid solution (HNO3) and dip the tip until a reaction occurs.  Now it is ready to dry with compressed air.  

This is just a sampling of the suggestions and recommendations from our Probe Tips and Probe Holders Reference Manual. Please see our website for more information and to view our wide assortment of quality probe holders and probe tips, many of which can now be ordered online.  

After narrowing down your choice of Micromanipulator’s various models of probe stations as well as accessories, we invite you to fill out our online “Request a Quotation” form to find out the cost of the equipment you are most interested in.  In order to best understand your needs, we ask that you fill out the form as complete as possible.  Also be sure to include your preferred contact method and availability. 

The form asks questions (just check the appropriate box) regarding the product category you would like a quotation for including: wafer probe station, application board probe station, accessories, and thermal chucks as well as information on our product service and support.  It is also helpful to know your areas of interest in failure analysis, wafer level reliability, device characterization, process modeling and process monitoring (i.e. CV).   

Our additional optional survey is designed to allow us to narrow down your application needs.  For example, we ask what type of measurements do you want to make such as RF; V (current/voltage); CV (capacitance/voltage), etc.   It is also helpful to advise you on equipment if we know the size of your wafers.  And are you planning to probe current below 1pA, and if you require temperature testing, to what temperature? 

Furthermore, Micromanipulator’s engineers are ready to answer any questions you may have and are a quick call away.  Also remember as a global company, we have sales representatives located around the world to provide expert advice and sales help. When you do decide to buy our products, we offer factory warranties and onsite support. 

For better efficiency and ease-of-use, we encourage you to take a look at Micromanipulator’s wide-ranging selection of disposable probe tips.  Our product line includes tips designed, engineered, and manufactured by us in response to the various needs of our customers.  

This means you will find reliable needle probes suitable for a broad range of applications.  Our probe tips are designed for general probing; low resistance; high power; compliant, thermal applications; sub-micron targets; delicate target or surface; and cutting. Also remember, our disposable tips offer the advantage of quick replacement and eliminate the down time associated with re-sharpening.  

For most probing applications, we recommend our high-quality nickel or tungsten shanked and tungsten tipped probe tips.  However, we also manufacture fine tips, small targets with ‘C’ bend, or very small targets with a bendable nickel or Dumet shank cat-whisker probe tips.  Please go to Micromanipulator’s website to see our full inventory of needles and probe holders and refer to our reference chart for recommendations regarding applications.  

Furthermore, if we do not have what you need, it easy to custom order a probe tip from our Model 7B Series Customizable Probe Tips available at our online store.  You select a point radius in a gold-plated tungsten or tungsten version. If your preference is a probe holder with a built-in probe tip, we suggest one of our most popular versions, the Model 44.  We think it is so versatile that is could almost be considered a customized probe.    

If it has been a while since you last visited Micromanipulator’s website, we encourage you to do so and to take a look at our changes.  Along with constantly developing new, innovative products, we now have an ecommerce store to order products online 24/7.  

The goal of the Micromanipulator Company is to provide the semiconductor industry with the cutting-edge tools they need to develop the products of the future. Our high-quality products allow our customers to focus on the data, not on the performance of the prober.  

In addition we provide specifications and details regarding what type of applications our products are best suited for as well as how to get the most out of our tools.  One important resource is our Application Notes that discuss in detail a myriad of common application problems encountered by users along with information on how to most effectively use Micromanipulator’s products.    

A prime example is our Application Note titled; Proven Techniques for Thermal Probing that provides expert recommendations for customers that use a hot stage for elevated temperature probing or CV Measurement.   A common problem of this type of probing is the uncontrolled movement that can cause the probe to slide or jump off its contact resulting in a movement of up to one mil at any location on a six or eight-inch wafer.  Along with thoroughly discussing and analyzing the causes and effects of these kinds of problems, we offer effective equipment solutions.

In addition to exploring the problem of movement of a device under the probe and the probe point due to thermal expansion, we give you solutions for maintaining probe contact during temperature stressing of wafers.  This includes discussing the merits of several of our probe holders and the advantages of each one.  Our primary advice is “a little technique can go a long way” when it comes to probing all forms of small geometries, and that with a little experimenting, operators will find the most suitable probing angle and/ or technique.  

We encourage you to visit our website and read through our complete hot stage probing techniques.  Finally if you still have questions, please give us a call as we not only manufacture our probe stations, accessories, and consumables, but we design and engineer them to meet our customers’ needs.    

If it has been a while since you last visited Micromanipulator’s website, you may be unaware that we now have an e-commerce store that makes it easier than ever for our customers to buy their consumable and accessory products. Along with probe tips, probe holders, and other products, you will find a wide selection of our quality manipulators.

All of our manipulators including our most economical models feature direct leadscrew-leadnut drives, ergonomic design and the highest stability available in the marketplace.  The 110 and 210 models are a mini-arc style with a resolution of 32 threads per inch (TPI) = 2.2 µm and a 10 mm 10 mm (0.4”) max travel along each axis.   The 450 and 550 models, also a mini-arc style, have a resolution of 100 TPI =0.7 µm (450/550) and a 6.4 mm (0.25”) max travel for each axis.  

Our e-commerce store additionally offers manipulators in a recti-linear style design with models 525 and 2525.  The 525 has a resolution of 100 TPI =0.7 µm and 200 TPI =0.35 µm for the 2525.  Both manipulators have a 12.7mm (0.5”) maximum travel along each axis.

Currently Micromanipulator’s online store does not offer our “Wave” series manipulators but it is still available and can be purchased directly from us. Our Wave manipulators feature X-Y and Z leadscrew-leadnut control plus theta and planarity controls for alignment of microwave, multi-probe, or mini-probe cards (such as Celadon’s “Versa Tile”).  The theta and planarity is provided through PLF and PLS Link arms that are purchased separately.

Please visit our website for more information regarding our products as well as to order your consumable and accessory products at our e-commerce store. If you have any questions, please give us a call.   

Not only will you find high-quality probe stations at the Micromanipulator Company but we make it easy to increase your efficiency by outfitting it with a reliable needle probe from our large assortment of over 90 different versions. Our needle probes are designed for a broad range of applications including general probing; high power; low current; high frequency, compliant, thermal applications; sub-micron targets; delicate target or surface; cutting and much more.   From high volume production support to high value critical FA return and everything in between, we have the best tip.  

Designed and manufactured at our U.S. headquarters, Micromanipulator’s disposable needle probes offer system users the advantage of quick replacement and eliminates the downtime associated with the need to re-sharpen.  Among our inventory, we offer designs made with nickel, or tungsten shanks and tungsten tips that are ideal for most probing applications.

Also our wide selection of fine tips includes disposable tips for small targets that have a ‘C’ bend as well as a bendable nickel or Durmet shank cat-whisker. Moreover we will customize a special probe tip for a nominal setup charge if you do not have what you need.  

For system users who prefer to use a probe holder with a built-in tip, we recommend our popular Model 44 that is engineered for high frequency and low level signal testing, and has so many options it is almost a custom probe. Along with being economical, the probe is perfect for the most common microwave tests and offers a frequency range from DC to 3 GHz.

When you buy from Micromanipulator, you are getting state-of-the-art products that have been expertly engineered to meet measurement equipment interface requirements as well tools that meet your personal preferences and budget. Please visit our website to learn more our products, warranties and life-cycle support.

While we are committed to providing our customers with the best products on the market, we are also mindful that budgetary concerns may factor into your decision.  This is why Micromanipulator is just as proud of our most economical probe stations as we are of our top-of-the-line models. Since our reputation is built on providing the semiconductor industry with the most dependable tools, when you buy one of our economy models; you have our word you are still getting the performance and reliability we are known for.  

Frequently an application does not require all of the features and high-performance we offer in more expensive models and it just makes sense to take a look at our line of economy probe stations.  One example is the 450PM (150-200mm) Manual Analytical 8” probe station that provides users with a low purchase price and low cost of ownership.  

Offering a stable, reliable probing performance, the popular 450PM design is based on the Model 4060 and offers extensive application coverage, comes with comprehensive accessory support and and is hot chuck compatible (field upgradeable).  With an ergonomic, compact design, it offers an efficient use of lab space as well as increases stability and ease of use.  Features include manual lead screw control of the stage that helps to ensure its long life and stable, quick positioning.   

Currently our inventory of used probe stations includes a Model 450PM that offer an even better bargain.  Many of our used products were used to conduct demonstration or are from our product upgrade and trade-in programs.  Moreover along with the great price for such a quality prober, all of our used tools come with a factory warranty and support just like our new products.   We invite you to visit our website to learn more about our extensive line of probe stations designed to meet your application and budget needs.