#depositon

One of the characteristics of a suitable thin film is the degree of uniformity of the deposited layer. Rotation of the substrate during coating is one of the most effective ways to increase the uniformity of thin film deposited in the Physical Vapor Deposition (PVD) method. The effectiveness of substrate rotation in improving the uniformity of the deposited thin film depends on the geometry of the substrate and how it rotates during the coating process. For example, in the case of substrates with a flat geometric shape (such as a disk), rotation about an axis perpendicular to the surface of the substrate is sufficient to create a uniform layer on it.

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However, for more complex geometric substrates that have uneven surfaces in terms of height, it is necessary to rotate the sample around other axes so that all the hidden angles of the substrate are covered and avoid shadowing of one area on the other area. This type of rotation is called Planetary Rotation. Planetary rotation (in three directions x, y, z) causes the pores of the porous specimens to be well covered. For example, when a porous rock is to be observed with an electron microscope, the inside of the cavities should also be covered with a thin layer of gold, and this will be possible by using a planetary sample rotator.

Most models of the vacuum deposition systems manufactured by VacCoat Ltd. such as Desk Sputter Coater (DSR1), Desk Carbon Coater (DCR), High Vacuum Sputter Coater DST1-170 and High Vacuum Carbon Coater (DCT), all known as SEM coaters, are equipped with a planetary rotation option. Recently, the researchers and experts of this company have started to upgrade the planetary rotating system of their product. Smoother rotation, more robustness, and easier installation are the features of this new sample planetary rotation system.

All sample holders installed on the products of VacCoat Ltd. can be designed and delivered according to the customer’s needs. Replacing and placing sample holders on these devices is very simple and the user is easily able to do it. For more information about the products of VacCoat Ltd., refer to its website.